Feasibility study of a 3D vibration-driven electromagnetic ...
2012-11-7 · Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with ... The device consists of a movable circular-mass patterned with three sets of double-layer aluminum (Al) coils, a circular-ring system incorporating a magnet and a supporting beam. ... Schematic drawing of the top view of a vibrating mass
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